Fundamentals of microelectromechanical (MEMS)
Literature Review
Step 1: Investigate this specific technology:
Micro Gripper
Step 2: Find at least (Undergrads: 3) archival journal articles on the technology.
• Do not cite only a web address.
• See list of appropriate journal titles.
• The citation should be in a form resembling: “A Two-Stage Discrete Peristaltic
Micropump,” J. M. Berg, R. C. Anderson, M. Anaya, B. Lalouh, M. Holtz, and T. Dallas,
Sensors and Actuators A 104, pp. 6-10 (2003).
Step 3: Write a review of the technology using the journal articles.
You should:
• compare and contrast the fabrication techniques used
• the relevant physics that controls the operation of the device
• state the performance limits
• explain the applications, and
• commercial viability.
You can include figures and graphs from sources that need to be referenced. You can make
your own diagrams to explain the technology.
Step 4:
Make sure citations are in the proper form. References should be tied to specific areas of
the text.
Step 5: Fill out the cover sheet and append to the beginning of the paper.
MEMS-related Journals
Journal of Microelectromechanical Systems [IEEE / ASME]
Sensors and Actuators A: Physical [Elsevier]
Sensors and Actuators B: Chemical [Elsevier]
Micromachine Devices [Cahners]
Journal of Micromechanics and Microengineering [Institute of Physics]
Micromachine [Japanese Micromachine Center]
Journal of Intelligent Material Systems and Structures [Smart Materials & Structures Research
Center, University of Maryland]
Biomedical Microdevices [Kluwer Academic Publishers]
Journal of Micromechatronics [VSP]
Sensors and Materials
Applied Physics Letters
Journal of Applied Physics
Lab on a Chip [Royal Society of Chemistry]
Analytical Chemistry [ACS]
Micro Total Analysis Systems 200x (books) [Kluwer/Springer]
Science
Nature
IEEE Sensors Journal
Category Max Actual
Analysis
5
0
References
(archival journals) 15
Proper citation 15
Physics/Chemistry 10
Style 10
Total 100